The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020) was successfully held in Vancouver, Canada, from January 18 - 22, 2020. The research team led by Prof. Xiaojing Mu from College of Optoelectronic Engineering, Chongqing University, presented five research studies in the fields of Micro-energy and Micro/Nano Sensing at this premier conference. In the research fields of micro-energy, the COE’s research team reported a novel MEMS structure of piezoelectric vibration energy harvester based on trapezoidal cantilever beam array and the improving performance of piezoelectric PVDF films via Ag@SiO₂ nanoparticles doping. In the research fields of micro/nano sensor, they present that the perfect absorption within infrared waveband has been realized by the artificial construction of super surface structure, and the trace detection of gas and biomolecule has been realized by using this structure. During the academic conference, the members of COE’s research team made a full discussion on the relevant research contents with researchers from universities and companies all over the world.

The IEEE International Conference on Micro Electro Mechanical Systems is one of the premier annual events reporting research results on every aspect of Microsystems technology. This conference reflects from the rapid proliferation of the commitment and success of the Microsystems research community.